A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes
Zhou, Chao1; Gong, Zheng2; Chen, Brandon K.2; Cao, Zhiqiang1; Yu, Junzhi1; Ru, Changhai3,4; Tan, Min1; Xie, Shaorong5; Sun, Yu2; Yu, Sun
2016-06-01
发表期刊IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷号21期号:3页码:1233-1241
文章类型Article
摘要**; Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I-V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sensing method with low power consumption is used to achieve nanometer sensing resolution and effective heat dissipation management. For automated probing of nanostructures, the position sensor-based closed-loop probing approach was found to be four times faster than visually servoed probing, and ten times faster compared to manual operation. Probing accuracy was determined to be better than 3 nm and a drift rate lower than 1 nm/min.
关键词Nanopositioning Nanomanipulation Probing Nanostructures
WOS标题词Science & Technology ; Technology
DOI10.1109/TMECH.2016.2533636
关键词[WOS]MULTIWALLED CARBON NANOTUBES ; BEAM-INDUCED DEPOSITION ; NANOROBOTIC MANIPULATION ; NANOWIRES
收录类别SCI
语种英语
项目资助者Natural Sciences and Engineering Research Council of Canada ; Ontario Ministry of Research and Innovation (ORF-RE funding) ; Hitachi High-Technologies Canada Inc. ; National Natural Science Foundation of China(61473295 ; Beijing Natural Science Foundation(4152054) ; International S&T Cooperation Program of China(2014DFA70470) ; Instrument Development Major Program of National Natural Science of China(61327811) ; Shanghai Municipal Science and Technology Commission Project(14JC1491500) ; 61528304 ; 71401189 ; 51575333)
WOS研究方向Automation & Control Systems ; Engineering
WOS类目Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS记录号WOS:000375609900004
引用统计
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/12136
专题复杂系统管理与控制国家重点实验室_先进机器人
通讯作者Yu, Sun
作者单位1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing 100190, Peoples R China
2.Univ Toronto, Adv Micro & Nanosyst Lab, Toronto, ON M5S 3G8, Canada
3.Soochow Univ, Jiangsu Prov Key Lab Adv Robot, Suzhou 215000, Peoples R China
4.Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215000, Peoples R China
5.Shanghai Univ, Dept Mechatron Engn, Shanghai 200072, Peoples R China
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Zhou, Chao,Gong, Zheng,Chen, Brandon K.,et al. A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2016,21(3):1233-1241.
APA Zhou, Chao.,Gong, Zheng.,Chen, Brandon K..,Cao, Zhiqiang.,Yu, Junzhi.,...&Yu, Sun.(2016).A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes.IEEE-ASME TRANSACTIONS ON MECHATRONICS,21(3),1233-1241.
MLA Zhou, Chao,et al."A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes".IEEE-ASME TRANSACTIONS ON MECHATRONICS 21.3(2016):1233-1241.
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