| A Stick-Slip Positioning Stage Robust to Load Variations | |
Wang, Yong1; Zhu, Junhui1; Pang, Ming2; Luo, Jun1; Xie, Shaorong1; Liu, Mei1; Sun, Lining5,6; Zhou, Chao3 ; Tan, Min3; Ge, Ji4; Sun, Yu4; Ru, Changhai2,5,6
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| Source Publication | IEEE-ASME TRANSACTIONS ON MECHATRONICS
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| 2016-08-01 | |
| Volume | 21Issue:4Pages:2165-2173 |
| Subtype | Article |
| Abstract | In stick-slip positioning, friction between the stick-slip surfaces plays a critical role in positioning accuracy. Positioning performance varies when the load to drive changes. In this paper, by using a form-closed cam, the driving unit is separated from the moving unit to eliminate load influence. The stage is capable of operating in either a stepping mode or a scanning mode. Numerical modeling was conducted to analyze the static and dynamic characteristics of the stage design. In experiments, a number of parameters were tested on the constructed stage, and positioning performance was measured via laser-doppler vibrometry. Experimental results demonstrate that in the stepping mode, the stage has a travel range of 2 mm with incremental step sizes ranging from 30 nm to 2.3 mu m. In the scanning mode, the stage has a positioning resolution of 1.15 nm. The measured results also confirm that load variations on the stage have little influence on contact friction force and positioning performance. |
| Keyword | Flexible Hinges Form-closed Cam Load Insensitive Precision Positioning Stick-slip |
| WOS Headings | Science & Technology ; Technology |
| DOI | 10.1109/TMECH.2016.2517102 |
| WOS Keyword | NANOPOSITIONING STAGE ; DESIGN ; ACTUATOR ; FORCE |
| Indexed By | SCI |
| Language | 英语 |
| Funding Organization | Instrument Development Major Program of National Natural Science of China(61327811) ; International S&T Cooperation Program of China(2014DFA70470) ; National Natural Science of China(61174087 ; Jiangsu Natural Science Founds for Distinguished Young Scholar(BK2012005) ; Shanghai Municipal Science and Technology Commission(14JC1491500) ; 61233010 ; 61528304) |
| WOS Research Area | Automation & Control Systems ; Engineering |
| WOS Subject | Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical |
| WOS ID | WOS:000380028200034 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ia.ac.cn/handle/173211/12158 |
| Collection | 复杂系统管理与控制国家重点实验室_先进机器人 |
| Affiliation | 1.Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200072, Peoples R China 2.Harbin Engn Univ, Coll Automat, Harbin 150001, Peoples R China 3.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China 4.Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada 5.Soochow Univ, Res Ctr Robot & Micro Syst, Suzhou 215021, Peoples R China 6.Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215021, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, Yong,Zhu, Junhui,Pang, Ming,et al. A Stick-Slip Positioning Stage Robust to Load Variations[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2016,21(4):2165-2173. |
| APA | Wang, Yong.,Zhu, Junhui.,Pang, Ming.,Luo, Jun.,Xie, Shaorong.,...&Ru, Changhai.(2016).A Stick-Slip Positioning Stage Robust to Load Variations.IEEE-ASME TRANSACTIONS ON MECHATRONICS,21(4),2165-2173. |
| MLA | Wang, Yong,et al."A Stick-Slip Positioning Stage Robust to Load Variations".IEEE-ASME TRANSACTIONS ON MECHATRONICS 21.4(2016):2165-2173. |
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| 56-A Stick-Slip Posi（1168KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Download | |
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