A Stick-Slip Positioning Stage Robust to Load Variations | |
Wang, Yong1; Zhu, Junhui1; Pang, Ming2; Luo, Jun1; Xie, Shaorong1; Liu, Mei1; Sun, Lining5,6; Zhou, Chao3![]() ![]() | |
发表期刊 | IEEE-ASME TRANSACTIONS ON MECHATRONICS
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2016-08-01 | |
卷号 | 21期号:4页码:2165-2173 |
文章类型 | Article |
摘要 | In stick-slip positioning, friction between the stick-slip surfaces plays a critical role in positioning accuracy. Positioning performance varies when the load to drive changes. In this paper, by using a form-closed cam, the driving unit is separated from the moving unit to eliminate load influence. The stage is capable of operating in either a stepping mode or a scanning mode. Numerical modeling was conducted to analyze the static and dynamic characteristics of the stage design. In experiments, a number of parameters were tested on the constructed stage, and positioning performance was measured via laser-doppler vibrometry. Experimental results demonstrate that in the stepping mode, the stage has a travel range of 2 mm with incremental step sizes ranging from 30 nm to 2.3 mu m. In the scanning mode, the stage has a positioning resolution of 1.15 nm. The measured results also confirm that load variations on the stage have little influence on contact friction force and positioning performance. |
关键词 | Flexible Hinges Form-closed Cam Load Insensitive Precision Positioning Stick-slip |
WOS标题词 | Science & Technology ; Technology |
DOI | 10.1109/TMECH.2016.2517102 |
关键词[WOS] | NANOPOSITIONING STAGE ; DESIGN ; ACTUATOR ; FORCE |
收录类别 | SCI |
语种 | 英语 |
项目资助者 | Instrument Development Major Program of National Natural Science of China(61327811) ; International S&T Cooperation Program of China(2014DFA70470) ; National Natural Science of China(61174087 ; Jiangsu Natural Science Founds for Distinguished Young Scholar(BK2012005) ; Shanghai Municipal Science and Technology Commission(14JC1491500) ; 61233010 ; 61528304) |
WOS研究方向 | Automation & Control Systems ; Engineering |
WOS类目 | Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical |
WOS记录号 | WOS:000380028200034 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ia.ac.cn/handle/173211/12158 |
专题 | 复杂系统管理与控制国家重点实验室_先进机器人 |
作者单位 | 1.Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200072, Peoples R China 2.Harbin Engn Univ, Coll Automat, Harbin 150001, Peoples R China 3.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China 4.Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada 5.Soochow Univ, Res Ctr Robot & Micro Syst, Suzhou 215021, Peoples R China 6.Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215021, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Yong,Zhu, Junhui,Pang, Ming,et al. A Stick-Slip Positioning Stage Robust to Load Variations[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2016,21(4):2165-2173. |
APA | Wang, Yong.,Zhu, Junhui.,Pang, Ming.,Luo, Jun.,Xie, Shaorong.,...&Ru, Changhai.(2016).A Stick-Slip Positioning Stage Robust to Load Variations.IEEE-ASME TRANSACTIONS ON MECHATRONICS,21(4),2165-2173. |
MLA | Wang, Yong,et al."A Stick-Slip Positioning Stage Robust to Load Variations".IEEE-ASME TRANSACTIONS ON MECHATRONICS 21.4(2016):2165-2173. |
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