A Stick-Slip Positioning Stage Robust to Load Variations
Wang, Yong1; Zhu, Junhui1; Pang, Ming2; Luo, Jun1; Xie, Shaorong1; Liu, Mei1; Sun, Lining5,6; Zhou, Chao3; Tan, Min3; Ge, Ji4; Sun, Yu4; Ru, Changhai2,5,6
2016-08-01
发表期刊IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷号21期号:4页码:2165-2173
文章类型Article
摘要In stick-slip positioning, friction between the stick-slip surfaces plays a critical role in positioning accuracy. Positioning performance varies when the load to drive changes. In this paper, by using a form-closed cam, the driving unit is separated from the moving unit to eliminate load influence. The stage is capable of operating in either a stepping mode or a scanning mode. Numerical modeling was conducted to analyze the static and dynamic characteristics of the stage design. In experiments, a number of parameters were tested on the constructed stage, and positioning performance was measured via laser-doppler vibrometry. Experimental results demonstrate that in the stepping mode, the stage has a travel range of 2 mm with incremental step sizes ranging from 30 nm to 2.3 mu m. In the scanning mode, the stage has a positioning resolution of 1.15 nm. The measured results also confirm that load variations on the stage have little influence on contact friction force and positioning performance.
关键词Flexible Hinges Form-closed Cam Load Insensitive Precision Positioning Stick-slip
WOS标题词Science & Technology ; Technology
DOI10.1109/TMECH.2016.2517102
关键词[WOS]NANOPOSITIONING STAGE ; DESIGN ; ACTUATOR ; FORCE
收录类别SCI
语种英语
项目资助者Instrument Development Major Program of National Natural Science of China(61327811) ; International S&T Cooperation Program of China(2014DFA70470) ; National Natural Science of China(61174087 ; Jiangsu Natural Science Founds for Distinguished Young Scholar(BK2012005) ; Shanghai Municipal Science and Technology Commission(14JC1491500) ; 61233010 ; 61528304)
WOS研究方向Automation & Control Systems ; Engineering
WOS类目Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS记录号WOS:000380028200034
引用统计
被引频次:3[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/12158
专题复杂系统管理与控制国家重点实验室_先进机器人
作者单位1.Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200072, Peoples R China
2.Harbin Engn Univ, Coll Automat, Harbin 150001, Peoples R China
3.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China
4.Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada
5.Soochow Univ, Res Ctr Robot & Micro Syst, Suzhou 215021, Peoples R China
6.Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215021, Peoples R China
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GB/T 7714
Wang, Yong,Zhu, Junhui,Pang, Ming,et al. A Stick-Slip Positioning Stage Robust to Load Variations[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2016,21(4):2165-2173.
APA Wang, Yong.,Zhu, Junhui.,Pang, Ming.,Luo, Jun.,Xie, Shaorong.,...&Ru, Changhai.(2016).A Stick-Slip Positioning Stage Robust to Load Variations.IEEE-ASME TRANSACTIONS ON MECHATRONICS,21(4),2165-2173.
MLA Wang, Yong,et al."A Stick-Slip Positioning Stage Robust to Load Variations".IEEE-ASME TRANSACTIONS ON MECHATRONICS 21.4(2016):2165-2173.
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