Weak scratch detection and defect classification methods for a large-aperture optical element
Tao, Xian; Xu, De; Zhang, Zheng-Tao; Zhang, Feng; Liu, Xi-Long; Zhang, Da-Peng
2017-03-15
发表期刊OPTICS COMMUNICATIONS
卷号387期号:0页码:390-400
文章类型Article
摘要Surface defects on optics cause optic failure and heavy loss to the optical system. Therefore, surface defects on optics must be carefully inspected. This paper proposes a coarse-to-fine detection strategy of weak scratches in complicated dark-field images. First, all possible scratches are detected based on bionic vision. Then, each possible scratch is precisely positioned and connected to a complete scratch by the LSD and a priori knowledge. Finally, multiple scratches with various types can be detected in dark-field images. To classify defects and pollutants, a classification method based on GIST features is proposed. This paper uses many real dark-field images as experimental images. The results show that this method can detect multiple types of weak scratches in complex images and that the defects can be correctly distinguished with interference. This method satisfies the real-time and accurate detection requirements of surface defects.
关键词Optical Inspection Weak Scratches Surface Defects Classification Large-aperture Optical Element
WOS标题词Science & Technology ; Physical Sciences
DOI10.1016/j.optcom.2016.10.062
关键词[WOS]LARGE FINE OPTICS ; SURFACE ; SYSTEM
收录类别SCI
语种英语
项目资助者National Natural Science Foundation of China(61227804 ; 61303177 ; 61473293 ; 61673383)
WOS研究方向Optics
WOS类目Optics
WOS记录号WOS:000390597300060
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/13380
专题精密感知与控制研究中心_精密感知与控制
作者单位Chinese Acad Sci, Inst Automat, Res Ctr Precis Sensing & Control, Beijing, Peoples R China
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GB/T 7714
Tao, Xian,Xu, De,Zhang, Zheng-Tao,et al. Weak scratch detection and defect classification methods for a large-aperture optical element[J]. OPTICS COMMUNICATIONS,2017,387(0):390-400.
APA Tao, Xian,Xu, De,Zhang, Zheng-Tao,Zhang, Feng,Liu, Xi-Long,&Zhang, Da-Peng.(2017).Weak scratch detection and defect classification methods for a large-aperture optical element.OPTICS COMMUNICATIONS,387(0),390-400.
MLA Tao, Xian,et al."Weak scratch detection and defect classification methods for a large-aperture optical element".OPTICS COMMUNICATIONS 387.0(2017):390-400.
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