CASIA OpenIR  > 复杂系统管理与控制国家重点实验室  > 先进机器人
Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
Zhou, Chao1; Deng, Lu2; Cheng, Long1; Cao, Zhiqiang1; Wang, Shuo1; Tan, Min1
Source PublicationSCANNING
2017
Issue2017Pages:8
SubtypeArticle
AbstractIn the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
KeywordMultiwalled Carbon Nanotubes Nanostructures Nanorobotic Manipulation System Electron-microscope
WOS HeadingsScience & Technology ; Technology
DOI10.1155/2017/3982503
WOS KeywordMULTIWALLED CARBON NANOTUBES ; NANOROBOTIC MANIPULATION ; ELECTRON-MICROSCOPE ; NANOSTRUCTURES ; SYSTEM
Indexed BySCI
Language英语
Funding OrganizationNational Natural Science Foundation of China(61528304 ; Beijing Natural Science Foundation(4152054) ; 71401189 ; 61473295)
WOS Research AreaInstruments & Instrumentation ; Microscopy
WOS SubjectInstruments & Instrumentation ; Microscopy
WOS IDWOS:000404856100001
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ia.ac.cn/handle/173211/15254
Collection复杂系统管理与控制国家重点实验室_先进机器人
Affiliation1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing, Peoples R China
2.Cent Univ Finance & Econ, Sch Stat & Math, Beijing, Peoples R China
Recommended Citation
GB/T 7714
Zhou, Chao,Deng, Lu,Cheng, Long,et al. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization[J]. SCANNING,2017(2017):8.
APA Zhou, Chao,Deng, Lu,Cheng, Long,Cao, Zhiqiang,Wang, Shuo,&Tan, Min.(2017).Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.SCANNING(2017),8.
MLA Zhou, Chao,et al."Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization".SCANNING .2017(2017):8.
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