Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
Zhou, Chao1; Deng, Lu2; Cheng, Long1; Cao, Zhiqiang1; Wang, Shuo1; Tan, Min1
2017
发表期刊SCANNING
期号2017页码:8
文章类型Article
摘要In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
关键词Multiwalled Carbon Nanotubes Nanostructures Nanorobotic Manipulation System Electron-microscope
WOS标题词Science & Technology ; Technology
DOI10.1155/2017/3982503
关键词[WOS]MULTIWALLED CARBON NANOTUBES ; NANOROBOTIC MANIPULATION ; ELECTRON-MICROSCOPE ; NANOSTRUCTURES ; SYSTEM
收录类别SCI
语种英语
项目资助者National Natural Science Foundation of China(61528304 ; Beijing Natural Science Foundation(4152054) ; 71401189 ; 61473295)
WOS研究方向Instruments & Instrumentation ; Microscopy
WOS类目Instruments & Instrumentation ; Microscopy
WOS记录号WOS:000404856100001
引用统计
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/15254
专题复杂系统管理与控制国家重点实验室_先进机器人
作者单位1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing, Peoples R China
2.Cent Univ Finance & Econ, Sch Stat & Math, Beijing, Peoples R China
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GB/T 7714
Zhou, Chao,Deng, Lu,Cheng, Long,et al. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization[J]. SCANNING,2017(2017):8.
APA Zhou, Chao,Deng, Lu,Cheng, Long,Cao, Zhiqiang,Wang, Shuo,&Tan, Min.(2017).Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.SCANNING(2017),8.
MLA Zhou, Chao,et al."Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization".SCANNING .2017(2017):8.
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