CASIA OpenIR  > 复杂系统管理与控制国家重点实验室  > 先进机器人
A TDC-Based nano-scale displacement measure method inside Scanning Electron Microscopes
Chao Zhou; Yu Wang; Zhengxing Wu; Lu Deng; Zhiqiang Cao; Shuo Wang; Min Tan
2016-12
Conference NameProc. IEEE Int. Conf. Robot. Biomim.
Conference Date2016-12
Conference PlaceQingdao, China
Document Type会议论文
Identifierhttp://ir.ia.ac.cn/handle/173211/15410
Collection复杂系统管理与控制国家重点实验室_先进机器人
Corresponding AuthorZhengxing Wu
Recommended Citation
GB/T 7714
Chao Zhou,Yu Wang,Zhengxing Wu,et al. A TDC-Based nano-scale displacement measure method inside Scanning Electron Microscopes[C],2016.
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