An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element
Wen-Dong Ding1,2; Zheng-Tao Zhang1,2; Da-Peng Zhang1,2; De Xu1,2; Hai-Bing Lv3; Xin-Xiang Miao3; Guo-Rui Zhou3; Hao Liu3
2017-08
发表期刊International Journal of Automation and Computing
卷号14期号:4页码:420-431
摘要

Surface particles growing in large aperture optical element (LAOE) have significant impact on LAOE's stable operation. It is a challenge for the online system to inspect the particles with long working distance, enough precision and high efficiency because of the system constraints. In this paper, an effective and portable inspection instrument is designed based on dark-field imaging principle. A Nikon lens and an industrial high definition (HD) camera are selected to construct the vision system to inspect particles of microns size spreading over hundreds of millimeters. Using two motors and other mechanical structure, the system can realize auto-focus and image rectification functions. The line light sources are installed on both sides of the LAOE in a sealed box while the vision system is portable and working outside the box. An adaptive binarization method is proposed to process the captured dark-field image. The distribution of particles on the LAOE's surface is investigated. Because of the high resolution of the captured image, the SSE2 instructions optimization method is used to reduce the time cost of the algorithm. Experiments show that the instrument can inspect LAOE effectively and accurately.

关键词Dark-field Imaging Image Rectification Adaptive Binarization Particle Inspection Large Aperture Optical Elements (Laoe)
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/15417
专题精密感知与控制研究中心_精密感知与控制
作者单位1.Research Center of Precision Sensing and Control, Institute of Automation, Chinese Academy of Sciences
2.School of Computer and Control Engineering, University of Chinese Academy of Sciences
3.Laser Fusion Research Center, China Academy of Engineering Physics
推荐引用方式
GB/T 7714
Wen-Dong Ding,Zheng-Tao Zhang,Da-Peng Zhang,et al. An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element[J]. International Journal of Automation and Computing,2017,14(4):420-431.
APA Wen-Dong Ding.,Zheng-Tao Zhang.,Da-Peng Zhang.,De Xu.,Hai-Bing Lv.,...&Hao Liu.(2017).An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element.International Journal of Automation and Computing,14(4),420-431.
MLA Wen-Dong Ding,et al."An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element".International Journal of Automation and Computing 14.4(2017):420-431.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
IJAC-2015-12-355.pdf(5041KB)期刊论文作者接受稿开放获取CC BY-NC-SA浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Wen-Dong Ding]的文章
[Zheng-Tao Zhang]的文章
[Da-Peng Zhang]的文章
百度学术
百度学术中相似的文章
[Wen-Dong Ding]的文章
[Zheng-Tao Zhang]的文章
[Da-Peng Zhang]的文章
必应学术
必应学术中相似的文章
[Wen-Dong Ding]的文章
[Zheng-Tao Zhang]的文章
[Da-Peng Zhang]的文章
相关权益政策
暂无数据
收藏/分享
文件名: IJAC-2015-12-355.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。