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An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element
Wen-Dong Ding1,2; Zheng-Tao Zhang1,2; Da-Peng Zhang1,2; De Xu1,2; Hai-Bing Lv3; Xin-Xiang Miao3; Guo-Rui Zhou3; Hao Liu3
Source PublicationInternational Journal of Automation and Computing
2017-08
Volume14Issue:4Pages:420-431
Abstract

Surface particles growing in large aperture optical element (LAOE) have significant impact on LAOE's stable operation. It is a challenge for the online system to inspect the particles with long working distance, enough precision and high efficiency because of the system constraints. In this paper, an effective and portable inspection instrument is designed based on dark-field imaging principle. A Nikon lens and an industrial high definition (HD) camera are selected to construct the vision system to inspect particles of microns size spreading over hundreds of millimeters. Using two motors and other mechanical structure, the system can realize auto-focus and image rectification functions. The line light sources are installed on both sides of the LAOE in a sealed box while the vision system is portable and working outside the box. An adaptive binarization method is proposed to process the captured dark-field image. The distribution of particles on the LAOE's surface is investigated. Because of the high resolution of the captured image, the SSE2 instructions optimization method is used to reduce the time cost of the algorithm. Experiments show that the instrument can inspect LAOE effectively and accurately.

KeywordDark-field Imaging Image Rectification Adaptive Binarization Particle Inspection Large Aperture Optical Elements (Laoe)
Document Type期刊论文
Identifierhttp://ir.ia.ac.cn/handle/173211/15417
Collection精密感知与控制研究中心_精密感知与控制
Affiliation1.Research Center of Precision Sensing and Control, Institute of Automation, Chinese Academy of Sciences
2.School of Computer and Control Engineering, University of Chinese Academy of Sciences
3.Laser Fusion Research Center, China Academy of Engineering Physics
First Author AffilicationChinese Acad Sci, Inst Automat, Res Ctr Precis Sensing & Control, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Wen-Dong Ding,Zheng-Tao Zhang,Da-Peng Zhang,et al. An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element[J]. International Journal of Automation and Computing,2017,14(4):420-431.
APA Wen-Dong Ding.,Zheng-Tao Zhang.,Da-Peng Zhang.,De Xu.,Hai-Bing Lv.,...&Hao Liu.(2017).An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element.International Journal of Automation and Computing,14(4),420-431.
MLA Wen-Dong Ding,et al."An Effective On-line Surface Particles Inspection Instrument for Large Aperture Optical Element".International Journal of Automation and Computing 14.4(2017):420-431.
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