CASIA OpenIR  > 复杂系统管理与控制国家重点实验室  > 先进机器人
Research on Nanoscale Displacement Online Modeling and Control of PCA
Qun, Jia1,2; Chao, Zhou1,2; Lu, Deng; Zhangming, Du1,2; Zhiqiang, Cao1,2
2017-12
Conference NameIEEE International Conference on Robotics and Biomimetics
Source PublicationIEEE International Conference on Robotics and Biomimetics
Pages1545-1550
Conference Date2017年12月5~8
Conference Place澳门
Abstract

This paper proposes the method of nanoscale microdisplacement modeling and control of the piezoelectric ceramic actuator (PCA) mounted on the end of a micro-nano robot. The robot works in the vacuum chamber of a Scanning Electron Microscope (SEM). We use the time-to-digital conversion (TDC) method to measure the displacement of the PCA. For the purpose of establishing the relationship of the applied voltage and the displacement of the PCA, we designed an online modeling and control system based on PC/104. Models with different order combinations are applied to fit the transfer function of the system and the least squares method is applied to identify the parameters of each model. In addition, the second-order transfer function model is used to approximate the open-loop transfer function model of piezoelectric ceramic by comparing the model fitting rate. Specially, some open-loop control experiments are performed to verify the accuracy of the model. Furthermore, a PID controller is proposed to achieve accurate position control for the PCA. In the end, simulation results demonstrate the feasibility and effectiveness of the closed-loop control system. 

Indexed ByEI
Language英语
Document Type会议论文
Identifierhttp://ir.ia.ac.cn/handle/173211/23606
Collection复杂系统管理与控制国家重点实验室_先进机器人
复杂系统管理与控制国家重点实验室
Corresponding AuthorLu, Deng
Affiliation1.Institute of Automation, Chinese Academy of Sciences
2.University of Chinese Academy of Sciences
3.School of Statistics and Mathematics, Central University of Finance and Economics
First Author AffilicationInstitute of Automation, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
Qun, Jia,Chao, Zhou,Lu, Deng,et al. Research on Nanoscale Displacement Online Modeling and Control of PCA[C],2017:1545-1550.
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