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Alternative TitleThe Study on Motion Control of Transport System and Pre-alignment Methods for Photo Mask
Thesis Advisor谭民 ; 徐德
Degree Grantor中国科学院研究生院
Place of Conferral中国科学院自动化研究所
Degree Discipline控制理论与控制工程
Keyword掩模版 四象限光电探测器 粗预对准 精细预对准 显微视觉 运动控制 Petri网 Photo Mask Fqpd Coarse Pre-alignment Fine Pre-alignment Microscopic Vision Motion Control Petri Net
Abstract掩模传输系统是光刻机的重要外围设备,它承担着掩模版传输和预对准的任务。本文围绕着掩模传输系统的功能要求,对掩模传输系统中的运动控制和预对准方法展开了研究。 本文首先对集成电路技术的发展、掩模光刻技术、掩模传输中的运动控制、掩模预对准方法等进行了综述,介绍了本文的选题背景、主要研究内容和意义。 其次,在分析掩模传输系统功能特点的基础上,讨论了掩模传输系统的工作原理以及机构和控制系统结构设计的要求,并对机构和控制系统进行了设计。 第三,提出了基于Petri网的掩模传输系统的软件设计方法。采用了Top-Down的方法设计了掩模传输系统总体Petri网模型,并用可达图、T-不变量和P-不变量分析了Petri网模型的性能,证明了该Petri网模型的安全性、有界性和可达性。论述了Petri网模型转换为梯形图(LLD)的方法,并将所建立的Petri网模型转换为可直接控制掩模传输系统的LLD。与此同时,给出了整个系统的进程监控、故障诊断及其处理方法。 第四,分析了掩模传输运动控制的特点,建立了掩模版传输和预对准过程中的运动控制模型。对掩模传输的运动控制采用了三闭环的位置控制模型,对掩模预对准采用了四闭环的运动控制模型。对运动控制PID参数,采用了神经元进行自适应调整,弥补了固定PID参数的不足;对对准过程中调整量的控制,设计了一个模糊控制器,解决了对准控制的鲁棒性问题。 第五,提出了掩模预对准方法。在分析了四象限探测器在掩模粗预对准中的工作原理的基础上,提出了基于四象限探测器的掩模粗预对准方法,并用实验验证了该预对准方法的有效性。对掩模精细预对准,本文提出了基于显微视觉的掩模精细预对准方法;对单个标记的对准,采用了基于图像的显微视觉伺服跟踪的方法。 最后,总结了本文所取得的研究成果,并指出了需要继续开展的研究工作。
Other AbstractPhoto mask transport system is important assistant equipment for photo mask lithography. Photo mask transport system transports and pre-aligns photo mask. This dissertation focuses on motion control and pre-alignment approach in order to achieve high speed and repeatable precision during system transporting photo mask for lithography. First of all, a review is given about the development of the technology of integrated circuits (ICs), motion control and pre-alignment approach used in photo mask lithography and so on. And then, an introduction is presented about the background, the main content and purpose of the study. Secondly, with an analysis about the function and characteristics of photo mask transport system, working principle and design requirement of mechanism and control system is put forward. The mechanism and its corresponding control system are designed to accomplish transport and pre-alignment of photo mask. Thirdly, a Petri net-based approach to software design for photo mask transport system is proposed. The whole Petri net model of photo mask transport is built by Top-Down method. The reachable graph, T- and P-invariants of the Petri net models built for photo mask loading and unloading are obtained The results from the analysis verify the safeness, boundeness and reachablity of the software model built above, which guarantees the realiablity of the software. An approach for the transformation of the Petri net model to ladder logic diagram (LLD) is presented. With the approach, the LLD for controlling the photo mask transport system is acquired. The Petri net model and LLD are built for monitoring running progress of the system, diagnosis and disposal of faults. Fourthly, an analysis is made about motion control characteristics of photo mask transport. The motion control models for photo mask transport and pre- alignment are built to control photo mask transport system. A three-closed-loop model is built to control the motion of photo mask transport. A four-closed-loop model is built to control the movement of the manipulator in photo mask’s pre-alignment. The PID parameters for motion control models are adaptively adjusted by the neuron to meet manipulator’s varying working conditions. A Fuzzy Logic Controller (FLC) is designed to control the pre-alignment, which increases the robustness of the pre- alignment course. Fifthly, the photo mask’s pre-alignment approach is given. The photo mask’s coarse pre-alignment approach is built on the analysis of characteristics of the FQPD. Experiment verifies the validity of the approach. A method based on microscopic vision is employed to give a fine pre-alignment of the photo mask. Results from simulation validate the algorithm of calculating the coordinates of the alignment mark’s center in the image. A conclusion about the study comes out at the end, and future study on the photo mask transport system is pointed out as well.
Other Identifier200418014628039
Document Type学位论文
Recommended Citation
GB/T 7714
刘云. 掩模传输系统的运动控制与预对准方法研究[D]. 中国科学院自动化研究所. 中国科学院研究生院,2007.
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