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基于PLC的运动控制与过程控制研究
Alternative TitleResearch on Motion Control and Process Control Based on PLC
李庆涛
Subtype工学硕士
Thesis Advisor徐德 ; 梁自泽
2008-05-21
Degree Grantor中国科学院研究生院
Place of Conferral中国科学院自动化研究所
Degree Discipline控制理论与控制工程
Keyword运动控制 过程控制 掩膜版传输 预对准 反渗透膜 膜热消毒 管道热消毒 Motion Control Process Control Mask Transport System Pre-alignment Reverse Osmosis Membrane Hot-disinfection Pipe Hot-disinfection
Abstract本文是在863项目“掩膜版传输系统”和横向项目“新型医用二次反渗透装置的控制系统设计”的支持下完成的。掩膜版传输系统是集成电路生产过程中光刻机的重要辅助设备,它承担着传输掩膜版和预对准掩膜版的任务。本文针对掩膜版的大范围、高速传输和高精度对准的特点,对掩膜版传输系统中的运动控制和预对准方法开展研究。医用二次反渗透装置是医院血液透析和其他血液净化治疗所用透析液调配用水的制造设备,其中设备的消毒方法是判断此类设备先进与否的依据。本文针对新型医用二次反渗透装置的管道和热消毒膜的热水消毒要求,对过程控制中温度、压力等常见控制量的控制方法开展研究。 本文首先介绍了运动控制和过程控制的发展概况和国内外现状,接着又介绍了PLC的发展概况和其在运动控制与过程控制中的应用情况。 其次,根据不同的分类依据,对运动控制系统与过程控制系统的分类展开讨论;分别介绍了运动控制系统和过程控制系统组成元件特点,并以最高性价比为原则,对运动控制系统和过程控制系统的设计选型进行论述。 第三,在分析掩膜版传输系统功能特点的基础上,设计了基于PLC的运动控制系统;根据掩膜版传输运动控制的特点,建立了掩膜版传输与预对准过程的运动控制模型,对掩膜版大范围、高速传输采用基于PLC的全闭环位置控制方法,对高精度预对准采用四闭环运动控制模型;在分析四象限探测器工作原理的基础上,提出了掩膜版预对准方法和对准控制策略。 第四,针对新型医用二次反渗透装置的二级反渗透膜的特性和消毒特点,设计了基于PLC的过程控制系统。针对变频器干扰或其它干扰,对模拟量输入信号进行数字滤波;针对透析用水点变化不定的特点,在经典PID控制的基础上提出了一种新的恒压控制策略;根据膜热消毒时的温度要求,提出了一种快速的基于PLC的混温控制策略。
Other AbstractThis dissertation is supported by the 863 project “mask transport system” and the project “control system design of novel medical twice hemodialysis reverse osmosis device”. The mask transport system is an essential auxiliary device for the lithography in manufacturing of integrated circuits, whose major function is to transport and pre-align the mask. In order to fulfill the project requirement of large range manipulation, high-speed transport, and high-precision alignment, the motion control method and the mask pre-alignment approach are studied in this dissertation. The medical twice reverse osmosis device is used for the hemodialysis and other hematic refinement. A primary criterion to justify the device performance is the employed disinfection method. To disinfect the device pipe and the thermal-disinfection membrane by the hot water, we propose the temperature and pressure control approaches for several basic process control problems. The main content of this dissertation lies in the following four aspects: First, the state of the art of the process control and motion control is reviewed; then the PLC development history and its related applications in the process and motion control fields are introduced. Second, according to the different classification method, the catalogues of the process control system and motion control system are further discussed. We also introduce the characteristics of the basic units composed of the process control system and motion control system. Then, based on the principle of the optimal cost-effective criterion, we propose a reasonable device selection scheme. Third, by the mask transport system project requirement, a PLC-based motion control system is implemented. The motion control models for the mask transport and pre-alignment is proposed. For the large range, high speed mask transport, a PLC-based close-loop position control algorithm is utilized. For the high precision pre-alignment, the novel pre-alignment and alignment approaches are presented using the four-quadrant detector. Fourth, according to the characteristics of thermal-disinfection membrane adopted in the novel medical twice reverse osmosis device, a PLC-based process control system is implemented. In order to counteract the disturbance of transducer and environment, a digital filter is employed for the analog input signals. By the characteristics of osmosis water, a new constant pressure control method is proposed based on the classical PID control. According to the temperature requirement in the membrane thermal-disinfection, a PLC-based quick mixed temperature control approach is given.
shelfnumXWLW1189
Other Identifier200528014628021
Language中文
Document Type学位论文
Identifierhttp://ir.ia.ac.cn/handle/173211/7434
Collection毕业生_硕士学位论文
Recommended Citation
GB/T 7714
李庆涛. 基于PLC的运动控制与过程控制研究[D]. 中国科学院自动化研究所. 中国科学院研究生院,2008.
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