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压电驱动微夹持器的结构设计与控制研究
其他题名Structure Design and Control of Piezoelectric-driven micro-gripper
高群
学位类型工程硕士
导师徐德
2013-05-23
学位授予单位中国科学院大学
学位授予地点中国科学院自动化研究所
学位专业控制工程
关键词微夹持器 柔顺机构 有限元方法 力/位传感 增量式pid Micro-gripper Compliant Mechanisms Finite Element Method Force/displacement Sensor Incremental Pid
摘要近几十年来,随着微细加工技术、微电子技术、MEMS技术、精密装配技术等的发展,微小器件的尺寸越来越小,装配精度要求越来越高。为了使被夹持器件不至于有较大的变形或损坏、并保证装配精度,对微小型零件的操作提出了越来越高的要求。对微小零件操作的典型结构之一就是微夹持器。 轻、小、薄、软是一般微细物体和微型构件的显著特征,而且它们的尺寸形状均不固定。所以我们设计的微夹持器应该具有良好的安全性、可靠性和适用性。鉴于此,研究一种具有高分辨率、能够实现平行夹持、具有大行程、并且集成力和位移反馈功能的微夹持器具有非常重要的现实意义。 本文在深入分析微夹持技术的国内外研究现状的基础上,以微靶装配为研究背景,针对在微靶装配过程中对如铝套筒(直径在5.5mm)、充气管(直径150um)等一类环状及管状微小零部件的夹持需求,设计了相应的微夹持器。研究了微夹持器的结构设计、夹持力/位移传感器设计、夹持力/位移控制等问题。本文的主要研究工作和成果如下: (1) 针对不同的零件夹持和操作的需求设计了两种微夹持器——对称式与非对称式微夹持器。 (2) 根据柔顺机构设计的基本原理提出了一种简化的机构建模方法,推导出了微夹持器执行器各个尺寸参数对运动特性以及强度的影响。 (3) 运用有限元方法对提出的机构简化建模方法的可行性进行了分析。对所设计的两种夹持器进行了实验特性分析,验证了设计方案的有效性。 (4) 针对非对称式单边运动微夹持器设计了夹持力/位移传感器,并对其进行了标定。采用增量式PI控制器对夹持力/位移进行了控制,取得了良好的控制效果。
其他摘要In recent decades, with the development of micro-fabrication technology, microelectronic technology, MEMS technology, precision assembly technology, the dimension of the device is getting smaller and smaller, and the accuracy of the assembly has become increasingly demanding. In order to ensure that there is not a large deformation or damage of the clamped device and ensure the accuracy of the assembly. There are ever-increasing demands of the manipulators of the micro devices. One of the typical structures of the manipulators of micro devices is micro-gripper. Light, small, thin and soft are the salient features of micro objects and components, and their size and shape are not fixed. So the micro-gripper designed should have good security, reliability and applicability. Therefore, the development of a micro-gripper with high resolution, parallel clamping, large stroke, and integrated force and displacement feedback function has a very important practical significance. In this thesis, we take micro-target assembly as research background on the basis of analyzing overall technical requirements and related literature. For the demand of clamping of a class of small ring-shaped and tubular objects such as aluminum sleeve (diameter 5.5 mm), and the inflatable tube (diameter 150um) in the process of micro-target assembly, appropriate micro-grippers are designed to ensure the successful completion of the assembly. This article makes research on the structure design of the micro-gripper, the design of the gripping force and displacement sensor and the control of the gripping force and displacement. The main research works and contributions of this thesis are shown as follows: (1) Two kinds of micro-gripper (symmetric and asymmetric) were designed based on the needs of different objects gripping and operating. (2) According to the basic principles of compliant mechanism design a simplified mechanism modeling method is proposed. The relationship of motion and strength characteristics and the parameters of the micro-gripper’s actuator size was deduced. (3) Finite element method was used to verify the feasibility of the simple modeling method.The experimental characterization of the two micro-grippers was conducted which verified the feasibility of design scheme. (4) Gripping force and displacement sensor were designed for the asymmetric unilateral movement micro-gripper. And their calibrations were done. Incremental PI controller was selected to cont...
馆藏号XWLW1934
其他标识符2010E8014669012
语种中文
文献类型学位论文
条目标识符http://ir.ia.ac.cn/handle/173211/7657
专题毕业生_硕士学位论文
推荐引用方式
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高群. 压电驱动微夹持器的结构设计与控制研究[D]. 中国科学院自动化研究所. 中国科学院大学,2013.
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