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Alternative TitleStudy on Correlative Techniques and Development of Large-scale IC Microscopic Images Acquisition System
Thesis Advisor韩华 ; 陈曦
Degree Grantor中国科学院大学
Place of Conferral中国科学院自动化研究所
Degree Discipline计算机技术
Keyword集成电路 显微图像 自动采集 自动对焦 预采集/采集 曲面拟合 图像配准 Autoit3 Integrated Circuit Micro-image Auto-acquisition Auto-focusing Pre-Acquisition / Acquisition Surface Fitting Image Registration Autoit3
Abstract集成电路分析工程实施的前提条件之一是获得参考芯片内部结构的全景图像。目前,全面分析纳米级工艺千万门规模的芯片,往往需要采集上百万幅清晰的显微图像,因此,针对纳米级芯片显微样品特点,建立稳定、准确、快速的大规模集成电路显微图像自动采集系统成为迫切需要解决的问题。 显微样片具有多层布线结构,需要进行逐层图像采集,使用的设备包括光学显微镜和场发射扫描电子显微镜。对于前者,层间介质的纵向透光性限制了自动对焦技术的使用;对于后者,当景深不能覆盖样片表面起伏时,仍然需要人工监视来获得准确表层布线图像。针对上述问题,本文系统分析了显微仪器成像特点、显微样片表面起伏特性以及电动载物台移动精度之间的关联,提出了使用预采集图像进行过程监督和对焦校正的显微图像自动采集方案,并将其应用于大规模集成电路显微图像自动采集。 本文重点解决了三个关键问题:提出了“预采集/采集”方法,即通过采集正确预采集图像作为基准,在采集过程中对采集图像进行监控,减少系统累积误差,提高了系统的稳定性;提出了基于图像配准的目标图像选取方法,使得采集过程的准确性得到保证;提出了基于曲面拟合的平台高度预测方法,显著提高了采集过程的快速性。基于上述技术,本文开发了基于曲面拟合和图像配准的光学显微图像采集系统,以及基于图像配准的电子显微图像采集系统,使得图像采集过程具备了稳定性好、准确性高和连续快速的特点。 应用本文开发的系统获取集成电路样片的正确显微图像,为集成电路分析工程提供了重要的基础。该系统还可以推广应用到对其他动植物样品(如昆虫、动物的胚胎、局部器官、植物等)以及工业材料等等进行正确显微图像的采集。
Other AbstractOne of the prerequisites of integrated circuit analysis is to get the panoramic image of the chips’ internal structure. At present, it often needs to collect millions of clear microscopic images to analysis nano-scale IC chips. Therefore, it becomes an urgent task to establish a stable, accurate, and fast large scale IC microscopic images acquisition system based on the characteristics of IC chips. IC chips are of the three-dimensional structure of multilayer routing. To acquire every layer images, equipment are needed, including optical microscopes and scanning electron microscopes. However, the transparent oxide layer medium limits the usage of the auto-focusing algorithms in the optical microscope. For the SEM, when the depth of field can’t cover the fluctuation of the curved surface, manual monitoring is still needed to acquire accurate surface images. According to the problems proposed above, this study systematically analyzed the correlation among the features of the microscopic instruments, the surface characteristics and the movement accuracy of the motorized stage, then developed a microscopic images acquisition system using pre-acquisition images to monitor the acquisition process, and applied to acquire IC microscopic images. The dissertation solves three key technique issues: designing a pre-acquisition/ acquisition approach, that is, acquire the right pre-acquired image as a standard to monitor the acquired images, in order to reduce the accumulated error and improve the stability of the system; designing an image selection method based on image registration, to guarantee the accuracy of the acquisition process; designing a platform height forecast method based on surface fitting, to significantly improve the speed of acquisition process. Based on these methods and techniques, the dissertation developed an IC optical- microscopic image acquisition system based on surface fitting and image registration, as well as an IC electron-microscopic image acquisition system based on image registration, which can acquire image continuously, automatically and rapidly, and make the image acquisition process with high stability and high accuracy. The correct microscopic images of integrated circuit chips acquired by the system developed in this dissertation provide an important foundation for the integrated circuit analysis. One the other hand, the system also can be applied to the high-resolution three-dimensional structure imaging of other biologica...
Other Identifier2010e8014669004
Document Type学位论文
Recommended Citation
GB/T 7714
张旭. 大规模集成电路显微图像自动采集系统相关技术研究与开发[D]. 中国科学院自动化研究所. 中国科学院大学,2013.
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