Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors

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	Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors
	Zhang, Xiangwen ; Wang, Fei-Yue; Li, Li
发表期刊	IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
	2007-06-01
卷号	54 期号:6 页码:1207-1216
文章类型	Article
摘要	In this paper, the perturbation method is used to study the velocity shift of surface acoustic waves (SAW) caused by surface pressure and temperature variations of piezoelectric substrates. Effects of pressures and temperatures on elastic, piezoelectric, and dielectric constants of piezoelectric substrates are fully considered as well as the initial stresses and boundary conditions. First, frequency pressure/temperature coefficients are introduced to reflect the relationship between the SAW resonant frequency and the pressure/temperature of the piezoelectric substrates. Second, delay pressure/temperature coefficients are introduced to reflect the relationship among the SAW delay time/phase and SAW delay line-based sensors' pressure and temperature. An objective function for performance evaluation of piezoelectric substrates is then defined in terms of their effective SAW coupling coefficients, power flow angles (PFA), acoustic propagation losses, and pressure and temperature coefficients. Finally, optimal selections of piezoelectric substrates and crystal cuts for SAW-based pressure, temperature, and pressure/temperature sensors are derived by calculating the corresponding objective function values among the range of X-cut, Y-cut, Z-cut, and rotated Y-cut quartz, lithium niobate, and lithium tantalate crystals in different propagation directions.
WOS标题词	Science & Technology ; Technology
关键词[WOS]	SURFACE ACOUSTIC-WAVES ; LITHIUM-NIOBATE ; SENSITIVE CUTS ; ALPHA-QUARTZ ; DEPENDENCE ; CONSTANTS ; VELOCITY ; COEFFICIENTS
收录类别	SCI
语种	英语
WOS研究方向	Acoustics ; Engineering
WOS类目	Acoustics ; Engineering, Electrical & Electronic
WOS记录号	WOS:000246894700014
引用统计	被引频次：23[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ia.ac.cn/handle/173211/9412
专题	09年以前成果
作者单位	1.Chinese Acad Sci, Key Lab Complex Syst & Intelligence Sci, Beijing, Peoples R China 2.Guilin Univ Elect Technol, Dept Comp Sci & Technol, Guilin, Peoples R China 3.Univ Arizona, Dept Syst & Ind Engn, Program Adv Res Complex Syst, Tucson, AZ 85721 USA 4.Tsinghua Univ, Dept Automat, Beijing 100084, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Xiangwen,Wang, Fei-Yue,Li, Li. Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL,2007,54(6):1207-1216.
APA	Zhang, Xiangwen,Wang, Fei-Yue,&Li, Li.(2007).Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors.IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL,54(6),1207-1216.
MLA	Zhang, Xiangwen,et al."Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors".IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 54.6(2007):1207-1216.

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