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Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors
Zhang, Xiangwen; Wang, Fei-Yue; Li, Li
Source PublicationIEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
2007-06-01
Volume54Issue:6Pages:1207-1216
SubtypeArticle
AbstractIn this paper, the perturbation method is used to study the velocity shift of surface acoustic waves (SAW) caused by surface pressure and temperature variations of piezoelectric substrates. Effects of pressures and temperatures on elastic, piezoelectric, and dielectric constants of piezoelectric substrates are fully considered as well as the initial stresses and boundary conditions. First, frequency pressure/temperature coefficients are introduced to reflect the relationship between the SAW resonant frequency and the pressure/temperature of the piezoelectric substrates. Second, delay pressure/temperature coefficients are introduced to reflect the relationship among the SAW delay time/phase and SAW delay line-based sensors' pressure and temperature. An objective function for performance evaluation of piezoelectric substrates is then defined in terms of their effective SAW coupling coefficients, power flow angles (PFA), acoustic propagation losses, and pressure and temperature coefficients. Finally, optimal selections of piezoelectric substrates and crystal cuts for SAW-based pressure, temperature, and pressure/temperature sensors are derived by calculating the corresponding objective function values among the range of X-cut, Y-cut, Z-cut, and rotated Y-cut quartz, lithium niobate, and lithium tantalate crystals in different propagation directions.
WOS HeadingsScience & Technology ; Technology
WOS KeywordSURFACE ACOUSTIC-WAVES ; LITHIUM-NIOBATE ; SENSITIVE CUTS ; ALPHA-QUARTZ ; DEPENDENCE ; CONSTANTS ; VELOCITY ; COEFFICIENTS
Indexed BySCI
Language英语
WOS Research AreaAcoustics ; Engineering
WOS SubjectAcoustics ; Engineering, Electrical & Electronic
WOS IDWOS:000246894700014
Citation statistics
Cited Times:15[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ia.ac.cn/handle/173211/9412
Collection09年以前成果
Affiliation1.Chinese Acad Sci, Key Lab Complex Syst & Intelligence Sci, Beijing, Peoples R China
2.Guilin Univ Elect Technol, Dept Comp Sci & Technol, Guilin, Peoples R China
3.Univ Arizona, Dept Syst & Ind Engn, Program Adv Res Complex Syst, Tucson, AZ 85721 USA
4.Tsinghua Univ, Dept Automat, Beijing 100084, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Xiangwen,Wang, Fei-Yue,Li, Li. Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL,2007,54(6):1207-1216.
APA Zhang, Xiangwen,Wang, Fei-Yue,&Li, Li.(2007).Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors.IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL,54(6),1207-1216.
MLA Zhang, Xiangwen,et al."Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors".IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 54.6(2007):1207-1216.
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