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Virtual production lines design for back-end semiconductor manufacturing systems
Tang, Y; Zhou, MC; Qiu, RG
Source PublicationIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
2003-08-01
Volume16Issue:3Pages:543-550
SubtypeArticle
AbstractThis paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.
KeywordHeuristic Algorithm Manufacturing Execution System Production Configuration Virtual Production Line
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS KeywordFABRICATION
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Physics
WOS SubjectEngineering, Manufacturing ; Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000184695600026
Citation statistics
Cited Times:16[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ia.ac.cn/handle/173211/9929
Collection09年以前成果
Affiliation1.Rowan Univ, Dept Elect & Comp Engn, Glassboro, NJ 08028 USA
2.New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA
3.Chinese Acad Sci, Inst Automat, Beijing 100080, Peoples R China
4.Penn State Univ, Dept Informat Sci, Malvern, PA 19355 USA
Recommended Citation
GB/T 7714
Tang, Y,Zhou, MC,Qiu, RG. Virtual production lines design for back-end semiconductor manufacturing systems[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,2003,16(3):543-550.
APA Tang, Y,Zhou, MC,&Qiu, RG.(2003).Virtual production lines design for back-end semiconductor manufacturing systems.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,16(3),543-550.
MLA Tang, Y,et al."Virtual production lines design for back-end semiconductor manufacturing systems".IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 16.3(2003):543-550.
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