A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation

doi:10.1007/s11633-020-1225-4

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	A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation
	Maniza Armin 1; Priyo Nath Roy 2; Sajal Kumar Das 1
发表期刊	International Journal of Automation and Computing
ISSN	1476-8186
	2020
卷号	17 期号:4 页码:479-501
摘要	This paper surveys the recent advances on the modeling and control of hysteresis of piezoelectric actuators (PTAs) in the context of high precision applications of atomic force microscopes (AFMs). The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable bandwidth and accuracy are discussed in detailed. Future challenges and the scope of possible research are presented to pave the way to video rate atomic force microscopy.
关键词	Hysteresis nonlinearities piezoelectric actuator smart actuator atomic force microscope.
DOI	10.1007/s11633-020-1225-4
引用统计	被引频次：12[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ia.ac.cn/handle/173211/42274
专题	学术期刊_Machine Intelligence Research
作者单位	1.Department of Mechatronics Engineering, Rajshahi University of Engineering & Technology, Rajshahi 6204, Bangladesh 2.Department of Mechatronics Engineering, Khulna University of Engineering & Technology, Khulna 9203, Bangladesh
推荐引用方式 GB/T 7714	Maniza Armin,Priyo Nath Roy,Sajal Kumar Das. A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation[J]. International Journal of Automation and Computing,2020,17(4):479-501.
APA	Maniza Armin,Priyo Nath Roy,&Sajal Kumar Das.(2020).A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation.International Journal of Automation and Computing,17(4),479-501.
MLA	Maniza Armin,et al."A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation".International Journal of Automation and Computing 17.4(2020):479-501.

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