This dissertation is supported by the 863 project “mask transport system” and the project “control system design of novel medical twice hemodialysis reverse osmosis device”. The mask transport system is an essential auxiliary device for the lithography in manufacturing of integrated circuits, whose major function is to transport and pre-align the mask. In order to fulfill the project requirement of large range manipulation, high-speed transport, and high-precision alignment, the motion control method and the mask pre-alignment approach are studied in this dissertation. The medical twice reverse osmosis device is used for the hemodialysis and other hematic refinement. A primary criterion to justify the device performance is the employed disinfection method. To disinfect the device pipe and the thermal-disinfection membrane by the hot water, we propose the temperature and pressure control approaches for several basic process control problems. The main content of this dissertation lies in the following four aspects: First, the state of the art of the process control and motion control is reviewed; then the PLC development history and its related applications in the process and motion control fields are introduced. Second, according to the different classification method, the catalogues of the process control system and motion control system are further discussed. We also introduce the characteristics of the basic units composed of the process control system and motion control system. Then, based on the principle of the optimal cost-effective criterion, we propose a reasonable device selection scheme. Third, by the mask transport system project requirement, a PLC-based motion control system is implemented. The motion control models for the mask transport and pre-alignment is proposed. For the large range, high speed mask transport, a PLC-based close-loop position control algorithm is utilized. For the high precision pre-alignment, the novel pre-alignment and alignment approaches are presented using the four-quadrant detector. Fourth, according to the characteristics of thermal-disinfection membrane adopted in the novel medical twice reverse osmosis device, a PLC-based process control system is implemented. In order to counteract the disturbance of transducer and environment, a digital filter is employed for the analog input signals. By the characteristics of osmosis water, a new constant pressure control method is proposed based on the classical PID control. According to the temperature requirement in the membrane thermal-disinfection, a PLC-based quick mixed temperature control approach is given.
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