Multiscale modeling and operation of PECVD of thin film solar cells
Crose, Marquis1; Kwon, Joseph Sang-Il1; Nayhouse, Michael1; Ni, Dong3; Christofides, Panagiotis D.1,2
2015-11-02
发表期刊CHEMICAL ENGINEERING SCIENCE
卷号136页码:50-61
文章类型Article
摘要This work proposes a multiscale modeling and operation framework for plasma-enhanced chemical vapor deposition (PECVD) of thin film silicon solar cells with uniform thickness and film surface microstructure that optimizes light trapping. Specifically, we focus on a single-wafer parallel-electrode PECVD process with showerhead arrangement and develop a multiscale model capturing both the gas-phase reaction and transport phenomena that lead to the deposition of the thin film across the wafer as well as multiple microscopic models that describe the evolution of the thin film surface microstructure at equispaced, discrete spatial locations across the wafer. While the modeling of chemical reactions and transport-phenomena (both diffusion and convection) in the gas-phase adopts the continuum hypothesis and is based on two-dimensional in space partial differential equations, a novel microscopic model is developed for the a-Si:H thin film surface evolution, which accounts for four microscopic processes: physisorption, surface migration, hydrogen abstraction and chemisorption. A hybrid kinetic Monte Carlo (kMC) algorithm is utilized to reduce computational requirements without compromising the accuracy of established chemical models that account for interactions amongst physisorbed radicals, and the microscopic model fidelity is established though calibration with experimentally obtained growth rates and surface morphology data. The results of the multiscale process model indicate that in order to produce a thin film with a diameter of 20 cm and a uniform thickness with surface microstructure that optimizes light trapping: (a) a sinusoidally grated wafer surface should be used in which the grating period and depth should correspond to values that lead to film surface roughness and height-height correlation length that are on the order of visible light wavelength range, and (b) the substrate temperature should be adjusted, along several concentric zones across the substrate, to compensate for a radially non-uniform deposition rate of the nil on the wafer owing to gas-phase transport phenomena. Due to the dependence of film growth rate on substrate temperature, the wafer surface is separated into four concentric zones, each with an independent heating element. Extensive simulations demonstrate that the use of appropriate sinusoidal wafer grating and the regulation of substrate temperature provide a viable and effective way for the PECVD of thin film silicon solar cells with uniform thickness and film surface microstructure that optimizes light trapping. (C) 2015 Elsevier Ltd. All rights reserved.
关键词Process Modeling Process Optimization Plasma-enhanced Chemical Vapor Deposition Thin Film Solar Cells Thin Film Surface Morphology Thin Film Thickness
WOS标题词Science & Technology ; Technology
DOI10.1016/j.ces.2015.02.027
关键词[WOS]HYDROGENATED AMORPHOUS-SILICON ; CHEMICAL-VAPOR-DEPOSITION ; LARGE-AREA PECVD ; SURFACE-MORPHOLOGY ; CRYSTALLIZATION ; DISCHARGES ; GRATINGS
收录类别SCI
语种英语
WOS研究方向Engineering
WOS类目Engineering, Chemical
WOS记录号WOS:000361408600006
引用统计
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/10734
专题复杂系统管理与控制国家重点实验室_先进机器人
作者单位1.Univ Calif Los Angeles, Dept Chem & Biomol Engn, Los Angeles, CA 90095 USA
2.Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
3.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China
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Crose, Marquis,Kwon, Joseph Sang-Il,Nayhouse, Michael,et al. Multiscale modeling and operation of PECVD of thin film solar cells[J]. CHEMICAL ENGINEERING SCIENCE,2015,136:50-61.
APA Crose, Marquis,Kwon, Joseph Sang-Il,Nayhouse, Michael,Ni, Dong,&Christofides, Panagiotis D..(2015).Multiscale modeling and operation of PECVD of thin film solar cells.CHEMICAL ENGINEERING SCIENCE,136,50-61.
MLA Crose, Marquis,et al."Multiscale modeling and operation of PECVD of thin film solar cells".CHEMICAL ENGINEERING SCIENCE 136(2015):50-61.
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