Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools

doi:10.1109/JAS.2020.1003069

CASIA OpenIR > 学术期刊 > IEEE/CAA Journal of Automatica Sinica

	Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools
	QingHua Zhu; Yan Qiao; NaiQi Wu; Yan Hou
发表期刊	IEEE/CAA Journal of Automatica Sinica
ISSN	2329-9266
	2020
卷号	7 期号:2 页码:597-605
摘要	Integrated circuit chips are produced on silicon wafers. Robotic cluster tools are widely used since they provide a reconfigurable and efficient environment for most wafer fabrication processes. Recent advances in new semiconductor materials bring about new functionality for integrated circuits. After a wafer is processed in a processing chamber, the wafer should be removed from there as fast as possible to guarantee its high-quality integrated circuits. Meanwhile, maximization of the throughput of robotic cluster tools is desired. This work aims to perform post-processing time-aware scheduling for such tools subject to wafer residency time constraints. To do so, closed-form expression algorithms are derived to compute robot waiting time accurately upon the analysis of particular events of robot waiting for single-arm cluster tools. Examples are given to show the application and effectiveness of the proposed algorithms.
关键词	Cluster tool discrete event systems optimization robotic systems scheduling
DOI	10.1109/JAS.2020.1003069
引用统计	被引频次：21[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ia.ac.cn/handle/173211/42968
专题	学术期刊_IEEE/CAA Journal of Automatica Sinica
推荐引用方式 GB/T 7714	QingHua Zhu,Yan Qiao,NaiQi Wu,et al. Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools[J]. IEEE/CAA Journal of Automatica Sinica,2020,7(2):597-605.
APA	QingHua Zhu,Yan Qiao,NaiQi Wu,&Yan Hou.(2020).Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools.IEEE/CAA Journal of Automatica Sinica,7(2),597-605.
MLA	QingHua Zhu,et al."Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools".IEEE/CAA Journal of Automatica Sinica 7.2(2020):597-605.

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