A Self-Supervised CNN for Particle Inspection on Optical Element
Hou W(侯伟); Tao X(陶显); Xu D(徐德)
发表期刊IEEE Transactions on Instrumentation and Measurement
ISSN0018-9456
2021-05
卷号70期号:1页码:1-12
通讯作者Tao, Xian(taoxian2013@ia.ac.cn)
摘要

In high-power laser instruments, optical elements play a significant role. Particles on the optical element degrade the system performance and even cause damage to the optical element. In this article, a particle inspection model based on self-supervised convolutional neural networks (CNNs) and transfer learning is proposed. The self-supervised network that is built on a rotation-flip-invariant pretext task is used to transform the image from grayscale feature to rotation-flip-invariant feature. Then, the learned feature is transferred to the central-pixel classification network that is fine-tuned on a small labeled dataset. The experiments show that the classification accuracy of our proposed method is 97.90%, which is higher than the other compared methods. For the whole image prediction, through feature reuse and pointwise convolution, the central-pixel classification network is adapted to the particle inspection network efficiently with minor changes. Since the method utilizes massive unlabeled data and is fine-tuned on a small number of labeled samples, it has the potential to be used in industrial production.

关键词Inspection Feature reuse optical element particle inspection self-supervised learning transfer learning
学科门类工学 ; 工学::计算机科学与技术(可授工学、理学学位)
DOI10.1109/TIM.2021.3077994
收录类别SCI
语种英语
资助项目Beijing Municipal Natural Science Foundation, China[4212044] ; National Natural Science Foundation of China[62066004]
项目资助者Beijing Municipal Natural Science Foundation, China ; National Natural Science Foundation of China
WOS研究方向Engineering ; Instruments & Instrumentation
WOS类目Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号WOS:000715343300006
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
七大方向——子方向分类目标检测、跟踪与识别
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/44874
专题中科院工业视觉智能装备工程实验室_精密感知与控制
通讯作者Tao X(陶显)
作者单位1.中国科学院大学人工智能学院
2.中国科学院自动化研究所
3.中国科学院自动化研究所
推荐引用方式
GB/T 7714
Hou W,Tao X,Xu D. A Self-Supervised CNN for Particle Inspection on Optical Element[J]. IEEE Transactions on Instrumentation and Measurement,2021,70(1):1-12.
APA Hou W,Tao X,&Xu D.(2021).A Self-Supervised CNN for Particle Inspection on Optical Element.IEEE Transactions on Instrumentation and Measurement,70(1),1-12.
MLA Hou W,et al."A Self-Supervised CNN for Particle Inspection on Optical Element".IEEE Transactions on Instrumentation and Measurement 70.1(2021):1-12.
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