In recent decades, with the development of micro-fabrication technology, microelectronic technology, MEMS technology, precision assembly technology, the dimension of the device is getting smaller and smaller, and the accuracy of the assembly has become increasingly demanding. In order to ensure that there is not a large deformation or damage of the clamped device and ensure the accuracy of the assembly. There are ever-increasing demands of the manipulators of the micro devices. One of the typical structures of the manipulators of micro devices is micro-gripper. Light, small, thin and soft are the salient features of micro objects and components, and their size and shape are not fixed. So the micro-gripper designed should have good security, reliability and applicability. Therefore, the development of a micro-gripper with high resolution, parallel clamping, large stroke, and integrated force and displacement feedback function has a very important practical significance. In this thesis, we take micro-target assembly as research background on the basis of analyzing overall technical requirements and related literature. For the demand of clamping of a class of small ring-shaped and tubular objects such as aluminum sleeve (diameter 5.5 mm), and the inflatable tube (diameter 150um) in the process of micro-target assembly, appropriate micro-grippers are designed to ensure the successful completion of the assembly. This article makes research on the structure design of the micro-gripper, the design of the gripping force and displacement sensor and the control of the gripping force and displacement. The main research works and contributions of this thesis are shown as follows: (1) Two kinds of micro-gripper (symmetric and asymmetric) were designed based on the needs of different objects gripping and operating. (2) According to the basic principles of compliant mechanism design a simplified mechanism modeling method is proposed. The relationship of motion and strength characteristics and the parameters of the micro-gripper’s actuator size was deduced. (3) Finite element method was used to verify the feasibility of the simple modeling method.The experimental characterization of the two micro-grippers was conducted which verified the feasibility of design scheme. (4) Gripping force and displacement sensor were designed for the asymmetric unilateral movement micro-gripper. And their calibrations were done. Incremental PI controller was selected to cont...
修改评论