Knowledge Commons of Institute of Automation,CAS
Research on Nanoscale Displacement Online Modeling and Control of PCA | |
Qun, Jia1,2; Chao, Zhou1,2; Lu, Deng; Zhangming, Du1,2; Zhiqiang, Cao1,2 | |
2017-12 | |
会议名称 | IEEE International Conference on Robotics and Biomimetics |
会议录名称 | IEEE International Conference on Robotics and Biomimetics |
页码 | 1545-1550 |
会议日期 | 2017年12月5~8 |
会议地点 | 澳门 |
摘要 | This paper proposes the method of nanoscale microdisplacement modeling and control of the piezoelectric ceramic actuator (PCA) mounted on the end of a micro-nano robot. The robot works in the vacuum chamber of a Scanning Electron Microscope (SEM). We use the time-to-digital conversion (TDC) method to measure the displacement of the PCA. For the purpose of establishing the relationship of the applied voltage and the displacement of the PCA, we designed an online modeling and control system based on PC/104. Models with different order combinations are applied to fit the transfer function of the system and the least squares method is applied to identify the parameters of each model. In addition, the second-order transfer function model is used to approximate the open-loop transfer function model of piezoelectric ceramic by comparing the model fitting rate. Specially, some open-loop control experiments are performed to verify the accuracy of the model. Furthermore, a PID controller is proposed to achieve accurate position control for the PCA. In the end, simulation results demonstrate the feasibility and effectiveness of the closed-loop control system. |
收录类别 | EI |
语种 | 英语 |
文献类型 | 会议论文 |
条目标识符 | http://ir.ia.ac.cn/handle/173211/23606 |
专题 | 复杂系统认知与决策实验室_先进机器人 复杂系统管理与控制国家重点实验室 |
通讯作者 | Lu, Deng |
作者单位 | 1.Institute of Automation, Chinese Academy of Sciences 2.University of Chinese Academy of Sciences 3.School of Statistics and Mathematics, Central University of Finance and Economics |
第一作者单位 | 中国科学院自动化研究所 |
推荐引用方式 GB/T 7714 | Qun, Jia,Chao, Zhou,Lu, Deng,et al. Research on Nanoscale Displacement Online Modeling and Control of PCA[C],2017:1545-1550. |
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