Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging
Yin, Yingjie; Xu, De; Zhang, Zhengtao; Bai, Mingran; Zhang, Feng; Tao, Xian; Wang, Xingang
2015
发表期刊STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING
卷号61期号:1页码:24-32
文章类型Article
摘要Methods of surface defect detection on optical devices are proposed in this paper. First, a series of microscopic dark-field scattering images were collected with a line-scan camera. Translation transformation between overlaps of adjacent microscopic dark-field scattering images resulted from the line-scan camera's imaging feature. An image mosaic algorithm based on scale invariance feature transform (SIFT) is proposed to stitch dark-field images collected by the line-scan camera. SIFT feature matching point-pairs were extracted from regions of interest in the adjacent microscopic dark-field scattering images. The best set of SIFT feature matching point-pairs was obtained via a parallel clustering algorithm: The transformation matrix of the two images was calculated by the best matching point-pair set, and then image stitching was completed through transformation matrix. Secondly, a sample threshold segmentation method was used to segment dark-field images that were previously stitched together because the image background was very dark. Finally, four different supervised learning classifiers are used to classify the defect represented by a six-dimensional feature vector by shape (point or line), and the performance of linear discriminant function (LDF) classifier is demonstrated to be the best. The experimental results showed that defects on optical devices could be detected efficiently by the proposed methods.
关键词Scale Invariance Feature Transform Linear Discriminant Function Cluster Algorithm Image Segmentation Image Mosaic Dark-field Imaging Optical Devices
WOS标题词Science & Technology ; Technology
关键词[WOS]CLASSIFIER ; RECOGNITION ; SIMULATION ; ROUGHNESS
收录类别SCI
语种英语
WOS研究方向Engineering
WOS类目Engineering, Mechanical
WOS记录号WOS:000348968600002
引用统计
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/8066
专题精密感知与控制研究中心_精密感知与控制
作者单位Chinese Acad Sci, Inst Automat, Res Ctr Precis Sensing & Control, Beijing, Peoples R China
推荐引用方式
GB/T 7714
Yin, Yingjie,Xu, De,Zhang, Zhengtao,et al. Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging[J]. STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING,2015,61(1):24-32.
APA Yin, Yingjie.,Xu, De.,Zhang, Zhengtao.,Bai, Mingran.,Zhang, Feng.,...&Wang, Xingang.(2015).Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging.STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING,61(1),24-32.
MLA Yin, Yingjie,et al."Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging".STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING 61.1(2015):24-32.
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