Knowledge Commons of Institute of Automation,CAS
A charge-amplifier based self-sensing method for measurement of piezoelectric displacement | |
Du, Zhangming1,2; Zhang, Tianlu1,2; Deng, Lu3; Zhou, Chao1; Cao, Zhiqiang1; Wang, Shuo1 | |
2017-08 | |
会议名称 | 2017 IEEE International Conference on Mechatronics and Automation (ICMA) |
会议日期 | 2017-08-06 |
会议地点 | Takamatsu, Japan |
出版者 | IEEE |
摘要 | Manipulation in nano-scale is important to the development of Nano-technology, while position sensing is the base of nano-manipulation. Self-sensing is a method providing true sensor-actuator collocation and especially suitable for room-limited workspace. This paper introduced a self-sensing method for displacement measurement, based on charge amplifier. The principle of self-sensing was derived from piezoelectric constitutive equations, and a charge amplifier circuit was developed to obtain the displacement of piezoelectric stack. A series of experiments were conducted to evaluate the characteristics of our method. The results of the experiments and some characteristics of charge-amplifier based self-sensing method were presented. |
关键词 | Nano manipulation, self-sensing, position measure, sensor characteristics |
DOI | 10.1109/ICMA.2017.8016124 |
收录类别 | EI |
语种 | 英语 |
引用统计 | |
文献类型 | 会议论文 |
条目标识符 | http://ir.ia.ac.cn/handle/173211/48476 |
专题 | 复杂系统认知与决策实验室_先进机器人 |
通讯作者 | Zhou, Chao |
作者单位 | 1.Institute of Automation, Chinese Academy of Sciences 2.University of Chinese Academy of Sciences 3.Central University of Finance and Economics |
第一作者单位 | 中国科学院自动化研究所 |
通讯作者单位 | 中国科学院自动化研究所 |
推荐引用方式 GB/T 7714 | Du, Zhangming,Zhang, Tianlu,Deng, Lu,et al. A charge-amplifier based self-sensing method for measurement of piezoelectric displacement[C]:IEEE,2017. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
A_charge-amplifier_b(1045KB) | 会议论文 | 开放获取 | CC BY-NC-SA | 浏览 |
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