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A charge-amplifier based self-sensing method for measurement of piezoelectric displacement
Du, Zhangming1,2; Zhang, Tianlu1,2; Deng, Lu3; Zhou, Chao1; Cao, Zhiqiang1; Wang, Shuo1
2017-08
会议名称2017 IEEE International Conference on Mechatronics and Automation (ICMA)
会议日期2017-08-06
会议地点Takamatsu, Japan
出版者IEEE
摘要

Manipulation in nano-scale is important to the development of Nano-technology, while position sensing is the base of nano-manipulation. Self-sensing is a method providing true sensor-actuator collocation and especially suitable for room-limited workspace. This paper introduced a self-sensing method for displacement measurement, based on charge amplifier. The principle of self-sensing was derived from piezoelectric constitutive equations, and a charge amplifier circuit was developed to obtain the displacement of piezoelectric stack. A series of experiments were conducted to evaluate the characteristics of our method. The results of the experiments and some characteristics of charge-amplifier based self-sensing method were presented.

关键词Nano manipulation, self-sensing, position measure, sensor characteristics
DOI10.1109/ICMA.2017.8016124
收录类别EI
语种英语
引用统计
文献类型会议论文
条目标识符http://ir.ia.ac.cn/handle/173211/48476
专题复杂系统认知与决策实验室_先进机器人
通讯作者Zhou, Chao
作者单位1.Institute of Automation, Chinese Academy of Sciences
2.University of Chinese Academy of Sciences
3.Central University of Finance and Economics
第一作者单位中国科学院自动化研究所
通讯作者单位中国科学院自动化研究所
推荐引用方式
GB/T 7714
Du, Zhangming,Zhang, Tianlu,Deng, Lu,et al. A charge-amplifier based self-sensing method for measurement of piezoelectric displacement[C]:IEEE,2017.
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