Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization

doi:10.1155/2017/3982503

	Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
	Zhou, Chao1 ; Deng, Lu 2; Cheng, Long1 ; Cao, Zhiqiang1 ; Wang, Shuo1 ; Tan, Min1
发表期刊	SCANNING
	2017
期号	2017 页码:8
文章类型	Article
摘要	In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
关键词	Multiwalled Carbon Nanotubes Nanostructures Nanorobotic Manipulation System Electron-microscope
WOS标题词	Science & Technology ; Technology
DOI	10.1155/2017/3982503
关键词[WOS]	MULTIWALLED CARBON NANOTUBES ; NANOROBOTIC MANIPULATION ; ELECTRON-MICROSCOPE ; NANOSTRUCTURES ; SYSTEM
收录类别	SCI
语种	英语
项目资助者	National Natural Science Foundation of China(61528304 ; Beijing Natural Science Foundation(4152054) ; 71401189 ; 61473295)
WOS研究方向	Instruments & Instrumentation ; Microscopy
WOS类目	Instruments & Instrumentation ; Microscopy
WOS记录号	WOS:000404856100001
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ia.ac.cn/handle/173211/15254
专题	复杂系统认知与决策实验室_先进机器人
作者单位	1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing, Peoples R China 2.Cent Univ Finance & Econ, Sch Stat & Math, Beijing, Peoples R China
第一作者单位	中国科学院自动化研究所
推荐引用方式 GB/T 7714	Zhou, Chao,Deng, Lu,Cheng, Long,et al. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization[J]. SCANNING,2017(2017):8.
APA	Zhou, Chao,Deng, Lu,Cheng, Long,Cao, Zhiqiang,Wang, Shuo,&Tan, Min.(2017).Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.SCANNING(2017),8.
MLA	Zhou, Chao,et al."Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization".SCANNING .2017(2017):8.

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