A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements

doi:10.1109/TIM.2015.2415092

CASIA OpenIR > 中科院工业视觉智能装备工程实验室 > 精密感知与控制

	A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements
	Tao, Xian; Zhang, Zhengtao; Zhang, Feng; Xu, De
发表期刊	IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
	2015-09-01
卷号	64 期号:9 页码:2530-2540
文章类型	Article
摘要	Surface defects on precision optical elements must be carefully inspected since they impact the normal operation of an optical system. It is a challenge to inspect defects of large-aperture optical elements using an imaging system because of efficiency and accuracy. This paper designs a novel and effective inspection instrument with two imaging systems for large-aperture optical elements. They are the dark-field imaging system (DFIS) with a line scan camera in 10-gm resolution and the bright-field (BF) imaging system with a microscopic camera in a 0.85-gm resolution. To keep the clarity of the DFIS in largescope quickly scanning, an adaptive scan path planning method is proposed. A set of novel algorithms is proposed to process a large number of dark-field images. Due to the limitations of the DFIS in scattering effect, the corresponding BF images are obtained according to the dark-field images. The classification of flaws and their sizes measurement based on BF images are also presented. The experiments show that the instrument can scan an optical element with the size of 810 mm x 460 mm in less than 6 min and the inspection precision can reach 3 mu m.
关键词	Bright-field Imaging System (Bfis) Dark-field Imaging System (Dfis) Flaw Inspection Image Processing Large-aperture Optical Element Measurement Path Planning
WOS标题词	Science & Technology ; Technology
DOI	10.1109/TIM.2015.2415092
关键词[WOS]	VISUAL INSPECTION ; DEFECTS
收录类别	SCI
语种	英语
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号	WOS:000359554900020
引用统计	被引频次：52[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ia.ac.cn/handle/173211/8901
专题	中科院工业视觉智能装备工程实验室_精密感知与控制
作者单位	Chinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China
第一作者单位	精密感知与控制研究中心
推荐引用方式 GB/T 7714	Tao, Xian,Zhang, Zhengtao,Zhang, Feng,et al. A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2015,64(9):2530-2540.
APA	Tao, Xian,Zhang, Zhengtao,Zhang, Feng,&Xu, De.(2015).A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,64(9),2530-2540.
MLA	Tao, Xian,et al."A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 64.9(2015):2530-2540.

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