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A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements
Tao, Xian; Zhang, Zhengtao; Zhang, Feng; Xu, De
Source PublicationIEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
2015-09-01
Volume64Issue:9Pages:2530-2540
SubtypeArticle
AbstractSurface defects on precision optical elements must be carefully inspected since they impact the normal operation of an optical system. It is a challenge to inspect defects of large-aperture optical elements using an imaging system because of efficiency and accuracy. This paper designs a novel and effective inspection instrument with two imaging systems for large-aperture optical elements. They are the dark-field imaging system (DFIS) with a line scan camera in 10-gm resolution and the bright-field (BF) imaging system with a microscopic camera in a 0.85-gm resolution. To keep the clarity of the DFIS in largescope quickly scanning, an adaptive scan path planning method is proposed. A set of novel algorithms is proposed to process a large number of dark-field images. Due to the limitations of the DFIS in scattering effect, the corresponding BF images are obtained according to the dark-field images. The classification of flaws and their sizes measurement based on BF images are also presented. The experiments show that the instrument can scan an optical element with the size of 810 mm x 460 mm in less than 6 min and the inspection precision can reach 3 mu m.
KeywordBright-field Imaging System (Bfis) Dark-field Imaging System (Dfis) Flaw Inspection Image Processing Large-aperture Optical Element Measurement Path Planning
WOS HeadingsScience & Technology ; Technology
DOI10.1109/TIM.2015.2415092
WOS KeywordVISUAL INSPECTION ; DEFECTS
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:000359554900020
Citation statistics
Cited Times:11[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ia.ac.cn/handle/173211/8901
Collection精密感知与控制研究中心_精密感知与控制
AffiliationChinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Tao, Xian,Zhang, Zhengtao,Zhang, Feng,et al. A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2015,64(9):2530-2540.
APA Tao, Xian,Zhang, Zhengtao,Zhang, Feng,&Xu, De.(2015).A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,64(9),2530-2540.
MLA Tao, Xian,et al."A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 64.9(2015):2530-2540.
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