A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements
Tao, Xian; Zhang, Zhengtao; Zhang, Feng; Xu, De
2015-09-01
发表期刊IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷号64期号:9页码:2530-2540
文章类型Article
摘要Surface defects on precision optical elements must be carefully inspected since they impact the normal operation of an optical system. It is a challenge to inspect defects of large-aperture optical elements using an imaging system because of efficiency and accuracy. This paper designs a novel and effective inspection instrument with two imaging systems for large-aperture optical elements. They are the dark-field imaging system (DFIS) with a line scan camera in 10-gm resolution and the bright-field (BF) imaging system with a microscopic camera in a 0.85-gm resolution. To keep the clarity of the DFIS in largescope quickly scanning, an adaptive scan path planning method is proposed. A set of novel algorithms is proposed to process a large number of dark-field images. Due to the limitations of the DFIS in scattering effect, the corresponding BF images are obtained according to the dark-field images. The classification of flaws and their sizes measurement based on BF images are also presented. The experiments show that the instrument can scan an optical element with the size of 810 mm x 460 mm in less than 6 min and the inspection precision can reach 3 mu m.
关键词Bright-field Imaging System (Bfis) Dark-field Imaging System (Dfis) Flaw Inspection Image Processing Large-aperture Optical Element Measurement Path Planning
WOS标题词Science & Technology ; Technology
DOI10.1109/TIM.2015.2415092
关键词[WOS]VISUAL INSPECTION ; DEFECTS
收录类别SCI
语种英语
WOS研究方向Engineering ; Instruments & Instrumentation
WOS类目Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号WOS:000359554900020
引用统计
文献类型期刊论文
条目标识符http://ir.ia.ac.cn/handle/173211/8901
专题精密感知与控制研究中心_精密感知与控制
作者单位Chinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China
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GB/T 7714
Tao, Xian,Zhang, Zhengtao,Zhang, Feng,et al. A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2015,64(9):2530-2540.
APA Tao, Xian,Zhang, Zhengtao,Zhang, Feng,&Xu, De.(2015).A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,64(9),2530-2540.
MLA Tao, Xian,et al."A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 64.9(2015):2530-2540.
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